Johann Zehetner, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky
Femtosecond Laser Processing of Membranes for Sensor Devices on different Bulk Materials
Číslo: 3/2017
Periodikum: Advances in Electrical and Electronic Engineering
DOI: 10.15598/aeee.v15i3.2033
Klíčová slova: AlGaN/GaN HEMT; diaphragms; laser ablation; LIPSS; SiC MEMS; slot waveguide, AlGaN / GaN HEMT; membrány; laserová ablace; LIPSS; SiC MEMS; slotový vlnovod.
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